JPH0220324U - - Google Patents
Info
- Publication number
- JPH0220324U JPH0220324U JP9827788U JP9827788U JPH0220324U JP H0220324 U JPH0220324 U JP H0220324U JP 9827788 U JP9827788 U JP 9827788U JP 9827788 U JP9827788 U JP 9827788U JP H0220324 U JPH0220324 U JP H0220324U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating chamber
- forming apparatus
- film forming
- reflecting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9827788U JPH0220324U (en]) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9827788U JPH0220324U (en]) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220324U true JPH0220324U (en]) | 1990-02-09 |
Family
ID=31324398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9827788U Pending JPH0220324U (en]) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220324U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010196116A (ja) * | 2009-02-25 | 2010-09-09 | Shimadzu Corp | インライン成膜処理装置 |
-
1988
- 1988-07-25 JP JP9827788U patent/JPH0220324U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010196116A (ja) * | 2009-02-25 | 2010-09-09 | Shimadzu Corp | インライン成膜処理装置 |